volume | PIER Journals

Abstract

This study presents the generation of a scalable model based on measurement aided numerical calculations for MiMCap (Metal-Insulator-Metal Capacitor) structures with a 0.25 µm SiGe-C BiCMOS technology. Various MiM capacitor structures with several different area and peripheral sizes are fabricated in an in-house developed BiCMOS process. A set of fix-size models and a generic scalable model are developed based on numerical EM calculations. The validity of the constructed model is verified with the measurement results. The model includes the breakdown voltage ratings which are also extracted through the measurements. The model, EM simulations and measurement results are in good agreement.

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Dr. Huseyin Aniktar

Dr. Huseyin Serif Savci