volume | PIER Journals

2018-08-29

Fabrication and Pressure Sensing Characterization of an Ultrathin Egg-Shaped Microbubble

Guanjun Wang,

Dr. Guanjun Wang

Collage of Information Science & Technology

Hainan University

China

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Mengxing Huang,

Dr. Mengxing Huang

Collage of Information Science & Technology

Hainan University

China

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Jinrong Liu,

Dr. Jinrong Liu

School of Information and Telecommunication Engineering

North University of China

China

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Yuhang Li,

Dr. Yuhang Li

Hainan University

China

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Shubin Zhang,

Dr. Shubin Zhang

Collage of Information Science & Technology

Hainan University

China

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Xue-Fen Wan,

Dr. Xue-Fen Wan

Department of Computer Science and Technology

North China Institute of Science and Technology

China

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Muhammad Sohail Sardar,

Dr. Muhammad Sohail Sardar

Department of Computer Science and Technology

North China Institute of Science and Technology

China

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Jianning Han,

Dr. Jianning Han

School of Information and Communication Engineering

North University of China

China

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Qingche Song,

Dr. Qingche Song

School of Information and Communication Engineering

North University of China

China

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Zhiguo Gui

Dr. Zhiguo Gui

School of Information and Communication Engineering

North University of China

China

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Progress In Electromagnetics Research M, Vol. 72, 165-174, 2018

doi:10.2528/PIERM18050602

Abstract

In this paper, an ultrathin egg-shaped microbubble was proposed and analyzed for pressure sensing firstly, which was fabricated by utilizing an improved pressure-assisted arc discharge technique. By tailoring the arc parameters and the position of glass tube during the fabrication process, the thinnest wall of the fabricated microbubble could reach 873 nm. Such an ultrathin film structure is very suitable for pressure sensing. Especially, as only a commercial fusion splitter and pressure pump were utilized to achieve such functions, the fabrication cost was very cheap. The fiber Fabry-Perot (FP) interference technique was used to analyze its pressure sensitivity by filling the inner wall of the microbubble with different air pressures. The experiment results depicted that the end face of microbubble expands with the increase of the filling pressure. The pressure sensitivity of such an egg-shaped microbubble could reach up to 14.3 pm/kPa in terms of interference spectrum shift, while the maximum cavity deformation sensitivity of the microbubble vs. pressure could reach up to 0.334 nm/kPa in terms of cavity length change. Besides, the maximum sensitivity vs. temperature was only 27.83 pm/˚C. Results of this study could be good reference for developing new pressure sensors with low cost, high sensitivity and good anti-temperature interference abilities.

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Guanjun Wang, Mengxing Huang, Jinrong Liu, Yuhang Li, Shubin Zhang, Xue-Fen Wan, Muhammad Sohail Sardar, Jianning Han, Qingche Song, and Zhiguo Gui, "Fabrication and Pressure Sensing Characterization of an Ultrathin Egg-Shaped Microbubble," Progress In Electromagnetics Research M, Vol. 72, 165-174, 2018.
doi:10.2528/PIERM18050602

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