volume | PIER Journals

Abstract

The effects of different geometries, heights and concentrations per unit area of gratings in the active region of a metal semiconductor metal photo-detector have been analyzed for enhanced charge collection through electromagnetic field analysis. Plots of the electric field amplitude as it propagates from the constricted grating region to a larger cross-section in the active region have been studied for comparison. This study shows that a hatched top cone shaped grating allows for maximum energy transfer into the active region, thus enhancing collection. The height for this structure is also a minimum over all structures, thus making the hatched cone the optimum design for enhanced collection. The cladding of such structures with SiO2 also appears to contribute to increased energy transfer into the substrate.

1. Nalwa, H. S., Photodetectors and Fiber Optics, Academic Press, 2001.

2. Chou, S. Y. and M. Y. Liu, "Nanoscale tera-hertz metalsemiconductor- metal photodetectors," IEEE J. Quantum Electron., Vol. 28, 2358-2368, 1992.
doi:10.1109/3.159542

3. Mullins, B. W., S. F. Soares, K. A. McArdle, C. Wilson, and S. R. J. Brueck, "A simple high-speed Si Schottky photodiode," IEEE Photon. Technol. Lett., Vol. 3, 360-362, 1991.
doi:10.1109/68.82112

4. Ho, Y. L. and K. S. Wong, "Bandwidth enhancement in silicon metal-semiconductor-metal photodetector by trench formation," IEEE Photon. Technol. Lett., Vol. 8, 1064-1066, 1996.
doi:10.1109/68.508739

5. Laih, L.-H., T.-C. Chang, Y.-A. Chen, W.-C. Tsay, and J.- W. Hong, "Characteristics of MSM photodetectors with trench electrodes on p-type Si wafer," IEEE Trans. Electron Devices, Vol. 45, 2018-2023, 1998.
doi:10.1109/16.711369

6. Liu, M. Y., E. Chen, and S. Y. Chou, "140-GHz metalsemiconductor- metal photodetectors on silicon-on-insulator substrate with a scaled active layer," Appl. Phys. Lett., Vol. 65, 887-888, 1994.
doi:10.1063/1.112190

7. Mott, N. F. and E. A. Davis, Electronic Processes in Noncrystalline Materials, 2nd ed., 1979.

8. Sharma, A. K., S. H.Zaidi, P. C. Logofatu, and S. R. J. Brueck, "Optical and electrical properties of nanostructured metal-siliconmetal photodetectors," IEEE J. Quantum Electron., Vol. 38, 1651-1660, 2002.
doi:10.1109/JQE.2002.805112

9. Kranthi, N. S., M. O. Nizam, P. Kirawanich, N. E. Islam, A. K. Sharma, and S. L. Lucero, "Fields analysis of enhanced charge collection in nanoscale grated photo detectors," Appl. Phys. Lett., Vol. 87, 244101, 2005.
doi:10.1063/1.2143137

10. CST Microwave Studio 5.0, Sonnet Software, Sonnet Software, Inc., 2005.

11. Sharma, A. K.S. H. Zaidi, G. Liecthy, and S. R. J. Brueck, "Enhanced optical and electrical characteristics of Si detectors integrated with periodic 1-D and 2-D semiconductor nanoscale structures," Proc. IEEE Nanotechnology, 368-373, 2001.

12. Kraus, J. D. and D. A. Fleisch, Electromagnetics with Applications, 5th ed., 1999.

13. Kristensson, G., "Homogenization of corrugated interfaces in electromagnetics," Progress in Electromagnetic Research, Vol. 55, 1-31, 2005.
doi:10.2528/PIER05020302

14. Gaylord, T. K. and M. G. Moharam, "Analysis and applications of optical diffraction by gratings," IEEE Trans. Electron Devices, Vol. 73, 894-937, 1985.

15. Sze, S. M., Physics of Semiconductor Devices, 2nd ed., 1981.

Dr. S. Kache

Dr. N. Kranthi

Dr. M. Nizam

Dr. Phumin Kirawanich

Dr. R. McLaren

Professor Naz E. Islam

Dr. A. Sharma

Dr. C. Mayberry

Dr. S. Lucero