volume | PIER Journals

Abstract

In this work, a micro displacement sensor based on dual micro-cavities coupled to a photonic crystal waveguide is proposed. The defects are introduced to create a sharp resonance in the structure which makes it useful for detecting micro displacement changes. The sensing principle is based on the change of the output signal transmission with the change of the displacement of a moving part compared to a fixed part of sensor structure. The proposed structure reached a good sensitivity of 9.52a^-1.

1. Jouannopoulos, J. D., S. G. Johnson, J. N. Winn, and R. D. Meade, Photonic Crystals: Molding the Flow of Light, Princeton University Press, Princeton, NJ, 1995.

2. Goyal, A. K., H. S. Duttaa, and S. Pal, "Recent advances and progress in photonic crystal based gas sensors ," Journal of Physics D: Applied Physics, Vol. 50, No. 20, 203001, 2017, https://doi.org/10.1088/1361-6463/aa68d3.
doi:10.1088/1361-6463/aa68d3

3. Cao, T., Y.-L. D. Ho, P. J. Heard, L. P. Barry, A. E. Kelly, and M. J. Cryan, "Fabrication and measurement of a photonic crystal waveguide integrated with a semiconductor optical amplifier," Journal of the Optical Society of America B, Vol. 26, No. 4, 768-777, April 2009.
doi:10.1364/JOSAB.26.000768

4. Cao, T., M. J. Cryan, Y.-L. D. Ho, I. J. Craddock, and C. J. Railton, "Fast-light based pulse compression in 2-D photonic crystal waveguides," Journal of Lightwave Technology, Vol. 25, No. 9, 2590-2598, September 2007.
doi:10.1109/JLT.2007.903825

5. Cao, T., M. J. Cryan, P. S. Ivanov, D. Ho, B. Ren, I. J. Craddock, J. M. Rorison, and C. J. Railton, "Modeling of chirped pulse propagation through a mini-stop band in a two-dimensional photonic crystal waveguide," Journal of the Optical Society of America B, Vol. 24, No. 7, 1575-1583, July 2007.
doi:10.1364/JOSAB.24.001575

6. Levy, O., B. Z. Steinberg, M. Nathan, and A. Boag, "Ultrasensitive displacement sensing using photonic crystal waveguides," photonic crystal waveguides, Vol. 86, No. 10, 104102-104104, 2005.

7. Xu, Z., L. Cao, C. Gu, Q. He, and G. Jin, "Micro-displacement sensor based on line-defect resonant cavity in photonic crystal," Optics Express, Vol. 14, No. 1, 298-305, 2006.
doi:10.1364/OPEX.14.000298

8. Yang, D., H. Tian, and Y. Ji, "Microdisplacement sensor based on high-Q nanocavity in slot photonic crystal," Optical Engineering, Vol. 50, No. 5, 054402, May 2011.
doi:10.1117/1.3574528

9. Olyaee, S. and M. Azizi, "Micro-displacement sensor based on high sensitivity photonic crystal," Photonic Sensors, Vol. 4, No. 3, 220-224, 2014.
doi:10.1007/s13320-014-0183-2

10. De Vlaminck, I., J. Roels, D. Taillaert, D. van Thourhout, R. Baets, L. Lagae, and G. Borghs, "Detection of nanomechanical motion by evanescent light wave coupling," Applied Physics Letters, Vol. 90, 233116, 2007.
doi:10.1063/1.2746067

11. Lee, C. and J. Thillaigovindan, "Optical nano mechanical sensor using a silicon photonic crystal cantilever embedded with a nanocavity resonator," Applied Optics, Vol. 48, 1797-1803, 2009.
doi:10.1364/AO.48.001797

12. Lee, C., R. Radhakrishnan, C. C. Chen, J. Li, J. Thillaigovindan, and N. Balasubramanian, "Design and modeling of a nano mechanical Sensor using silicon photonic crystals," Journal of Light Wave Technology, Vol. 26, 839-846, 2008.
doi:10.1109/JLT.2007.915273

13. Lin, H., Z. Luo, T. Gu, L. C. Kimerling, W. Kazumi, A. Agarwal, and J. Hu, "Mid-infrared integrated photonics on silicon: A perspective," Nanophotonics, Vol. 7, No. 2, 393-420, 2018.
doi:10.1515/nanoph-2017-0085

14. Cao, T., L. Fang, Y. Cao, N. Li, Z. Fan, and Z. Tao, "Dynamically reconfigurable topological edge state in phase change photonic crystals," Elsevier Science Bulletin, Vol. 64, 814-822, 2019.
doi:10.1016/j.scib.2019.02.017

15. Tyoub, H., A. Hocin, and A. Harhouz, "Mid-infrared refractive index sensor based on 2D photonic crystal coupled cavity-two waveguides," Indtrumentation Mesure Metrologie, Vol. 18, No. 2, 165-169, 2019.
doi:10.18280/i2m.180211

16. Qiu, M., "Effective index method for heterostructure-slab-waveguide-based two dimensional photonic crystal," Appl. Phys. Lett., Vol. 81, 1163, 2002.
doi:10.1063/1.1500774

17. Zouache, T., A. Hocini, and X. Wang, "Cavity-coupled photonic crystal waveguide as highly sensitive platform for pressure sensing," Optik --- International Journal for Light and Electron Optics, Vol. 172, 97-106, 2018.
doi:10.1016/j.ijleo.2018.06.120

18. Ho, D. Y. L., T. Cao, S. Pavel, M. J. I. Cryan, I. J. Craddock, C. J. Railton, and J. G. Rarity, "Three-dimensional FDTD simulation of micro-pillar microcavity geometries suitable for efficient single-photon sources," IEEE J. Quantum Electronics (JQE), Vol. 43, 462, 2007.
doi:10.1109/JQE.2007.897905

Dr. Tarek Zouache

Professor Abdesselam Hocini