1. Farrington, N. E. S. and S. Iezekiel, "Deisgn and simulation of membrane supported transmission lines for interconnects in a mm-wave multichip module," Progress In Electromagnetics Research B, Vol. 27, 165-186, 2011.
2. Farrington, N. E. S., Micromachined transmission line inter-connects for millimetre-wave multi-chip modules, Ph.D. thesis, School of Electrical and Electronic Engineering, The University of Leeds, 2005.
3. Dib, N. I., W. P. Harokopus, Jr., L. P. B. Katehi, C. C. Ling, and G. M. Rebeiz, "Study of a novel planar transmission line," IEEE Int. Microwave Theory Tech. Symposium Digest, 623-626.
4. Weller, T. M., G. M. Rebeiz, and L. P. Katehi, "Experimental results on microshield transmission line circuits," IEEE MTT-S Digest, 827-830, 1993.
doi:10.1109/MWSYM.1993.276747
5. Dib, N. I. and P. B. Katehi, "Impedance calculation for the microshield line," IEEE Microwave and Guided Wave Letters, Vol. 2, No. 10, 406-408, Oct. 1992.
doi:10.1109/75.160122
6. Weller, T. M., L. P. Katehi, and G. M. Rebeiz, "High-performance microshield line components," IEEE Trans. Microwave Theory Tech., Vol. 43, No. 3, 534-543, Mar. 1995.
doi:10.1109/22.372098
7. Weller, T. M., L. P. Katehi, and G. M. Rebeiz, "A 250-GHz Microshield bandpas filter," IEEE Microwave and Guided Wave Letters, Vol. 5, No. 5, May 1995.
doi:10.1109/75.374082
8. Petrini, I., F. Giacomozzi, D. Neculoiu, D. Vasilache, C. Buiculescu, and A. Muller, "Micromachined hybrid integrated receiver modules for 38 GHz and 77 GHz, on silicon substrate, technology and manufacturing," Semiconductor Conference, 2002, CAS 2002 Proc., Vol. 1, 29-32, Oct. 2002.
9. Duwe, K., S. Hirsch, and J. Muller, "Micromachined low pass filters and coplanar waveguides for D-band frequencies based on HMDSN-membranes," MSMW 2001 Symposium Proc., 675-677, Jun. 2001.
10. Liu, W. Y., D. P. Steenson, and M. B. Steer, "Membrane-supported CPW with mounted active devices," IEEE Microwave and Wireless Component Letters, Vol. 11, No. 4, 167-169, Apr. 2001.
doi:10.1109/7260.916332
11. Liu, W. Y., "Mass produced copper-on-polymer-membrane boards for micromachined millimeter-wave circuits," IEEE EDMO Proc., 205-210, Vienna, 2001.
12. Drayton, R. F. and L. P. B. Katehi, "Development of self-packaged high frequency circuits using micromachining techniques," IEEE Trans. Microwave Theory Tech., Vol. 43, No. 9, 2073-2080, Sep. 1995.
doi:10.1109/22.414543
13. Katehi, L. P. B. and G. M. Rebeiz, "Novel micromachined approaches to MMICs using low-parasitic, high-performance transmission media and environments," IEEE Int. Microwave Theory Tech. Symposium Digest, 1145-1148, 1996.
14. Robertson, S. V., L. P. B. Katehi, and G. M. Rebeiz, "Micromachined W-band filters," IEEE Trans. Microwave Theory Tech., Vol. 44, No. 4, 598-606, Apr. 1996.
doi:10.1109/22.491027
15. Rebeiz, G. M., L. P. B. Katehi, T. M. Weller, C. Y. Chi, and S. V. Robertson, "Micromachined membrane filters for microwave and millimetre-wave applications (Invited article)," Int. J. of Microwave and Millimeter-wave Computer Aided Engineering, Vol. 7, 149-166, Feb. 1997.
doi:10.1002/(SICI)1522-6301(199703)7:2<149::AID-MMCE1>3.0.CO;2-N
16. Robertson, S. V., A. R. Brown, L. P. B. Katehi, and G. M. Rebeiz, "A 10--60-GHz micromachined directional coupler," IEEE Trans. Microwave Theory Tech., Vol. 46, No. 11, 1845-1849, Nov. 1998.
doi:10.1109/22.734498
17. Henderson, R. M., T. M. Weller, and L. P. B. Katehi, "Three-dimensional W-band circuits using Si micromachining," IEEE Int. Microwave Theory Tech. Symposium Dig., Vol. 2, 13-19, 441--444, Jun. 1999.
18. Lee, K. Y., N. LaBianca, S. A. Rishton, S. Zolgharnain, J. D. Gelorme, J. Shaw, and T. H. P. Chang, "Micromachining applications of a high resolution ultrathick photoresist," J. Vacuum Science and Technology B., Vol. 13, No. 6, 3012-3016, Nov./Dec. 1995.
doi:10.1116/1.588297
19. Lorenz, H., M. Despont, N. Fahrni, N. LaBianca, P. Renaud, and P. Vettiger, "SU-8: A low-cost negative resist for MEMS," J. of Micromechanical Microengineering, Vol. 7, 121-124, 1997.
doi:10.1088/0960-1317/7/3/010
20. Despont, M., H. Lorenz, N. Fahrni, J. Brugger, P. Renaud, and P. Vettiger, "High-aspect-ratio, ultrathick, negative-tone near-UV photoresist for MEMs applications," IEEE Proc. Int. Workshop on Micro-electro Mechanical Systems, 518-522, Jan. 1997.
21. Lorenz, H., M. Laudon, and P. Renaud, "Mechanical characterization of a new high-aspect_ratio near UV-photoresist," J. Micro-electronic Engineering, Vol. 41--42, 371-374, 1998.
22. Farrington, N. E. S. and S. Iezekiel, "Accurate layer thickness control and planarization for multi-layer SU-8 structures," SPIE J. Micro./Nanolith. MEMS MOEMS, Vol. 10, 013019, Mar. 29, 2011, doi:10.1117/1.3563599.
23. Henderson, R. M., K. J. Herrick, T. M. Weller, S. V. Robertson, R. T. Kihm, and L. P. B. Katehi, "Three-dimensional high-frequency distribution networks. II. Packaging and integration," IEEE Trans. Microwave Theory Tech., Vol. 48, No. 10, 1643-1651, Oct. 2000.
doi:10.1109/22.873891
24. Katehi, L. P. B., J. F. Harvey, and K. J. Herrick, "3-D integration of RF circuits using Si micromachining," IEEE Microwave Magazine, 30-39, Mar. 2001.
doi:10.1109/6668.918260
25. Coutant, M. and K. Chang, "Broadband, electrically long vertical waveguide interconnect," Electronic Letters, Vol. 36, No. 25, 2076-2078, Dec. 2000.
doi:10.1049/el:20001422
26. Davidovitz, M., R. A. Sainati, and S. J. Fraasch, "A non-contact interconnect through an electrically thick ground plate common to two microstrip lines," IEEE Trans. Microwave Theory Tech., Vol. 43, No. 4, 753-759, Apr. 1995.
doi:10.1109/22.375221
27. Jackson, R. W. and D. W. Matolak, "Surface-to-surface transition via electromagnetic coupling of coplanar waveguides," IEEE Trans. Microwave Theory Tech., Vol. 35, No. 11, 1027-1031, Nov. 1987.
doi:10.1109/TMTT.1987.1133802
28. Ho, C.-H., L. Fan, and K. Chang, "Slot-coupled double-sided microstrip interconnects and couplers," IEEE Int. Microwave Theory Tech. Symposium Digest, 1321-1324, Jun. 1993.
doi:10.1109/MWSYM.1993.277119
29. VandenBerg, N. L. and L. P. B. Katehi, "Broadband vertical interconnects using slot-coupled shielded microstrip lines," IEEE Trans. Microwave Theory Tech., Vol. 40, No. 1, 81-88, Jan. 1992.
doi:10.1109/22.108326
30. Raskin, J.-P., G. Gauthier, L. P. B. Katehi, and G. M. Rebeiz, "W-band single-layer vertical transitions," IEEE Trans. Microwave Theory Tech., Vol. 48, No. 1, 161-164, Jan. 2000.
doi:10.1109/22.817487
31. Herrick, K. J., J.-G. Yook, and L. P. B. Katehi, "Microtechnology in the development of three-dimensional circuits," IEEE Trans. Microwave Theory Tech., Vol. 46, No. 11, 1832-1844, Nov. 1998.
doi:10.1109/22.734496
32. Ommodt, K., S. Sanzgiri, F. German, and T. Jones, "Vertical interconnects for phased array packaging," IEEE Antennas and Propagation Society Int. Symposium Dig., Vol. 2, 1334-1337, Jul. 1996.
33. Minotani, T., Y. Royter, H. Ishii, A. Hirata, K. Machida, A. Sasaki, and T. Nagatsuma, "Three-dimensional millimeter-wave photonic integrated circuits on Si," IEEE Int. Microwave Theory Tech. Symposium Dig., Vol. 1, 57-60, May 2001.
34. Goverdhanam, K., R. N. Simons, and L. P. B. Katehi, "Novel three-dimensional vertical interconnect technology for microwave and RF applications," IEEE Int. Microwave Theory Tech. IEEE Int. Microwave Theory Tech., Vol. 2, 641-644, Jun. 1999.
35. Becker, J. P. and L. P. B. Katehi, "Multilevel finite ground coplanar line transitions for high-density packaging using silicon micromachining," IEEE Int. Microwave Theory Tech. Symposium Dig., Vol. 1, 303-306, Jun. 2000.
36. Alléaume, P., C. Toussain, T. Huet, and M. Camiade, "Millimeter-wave SMT low cost plastic packages for automotive RADAR at 77 GHz and high data rate E-band radios," IEEE Int. Microwave Theory Tech. Symposium Dig., Vol. 1, 789-792, Jun. 2009.
37. Byun, W., B. Kim, K. Kim, K. Eun, M. S. Kulke, R. Kersten, O. Mollenbeck, G. Rittweger, and M. Daejeon, "Design of vertical transition for 40 GHz transceiver module using LTCC technology," Proc. European Microwave Integrated Circuit Conference, EuMIC 2007, 555-558, Munich, Germany, 2007.
38. Lau, J. H., "Flip chip technologies," McGraw Hill, 1996.
39. Lin, J.-K., J. Drye, W. Lytle, T. Scharr, R. Subrahmanya, and R. Sharma, "Conductive polymer bump interconnects," IEEE Proc. Electronic Components and Technology Conference, 1059-1068, May 1996.
40. Oh, K. W. and C. H. Ahn, "Flip-chip packaging with micromachined conductive polymer bumps," IEEE Proc. Adhesive Joining and Coating Technology in Electronic Manufacturing, 224-228, Sep. 1998.
41. Oh, K. W., C. H. Ahn, and K. P. Roenker, "Flip-chip packaging using micromachined conductive polymer bumps and alignment pedestals for MOEMS," IEEE J. on Selected Topics in Quantum Electronics, Vol. 5, No. 1, 119-126, Jan./Feb. 1999.
doi:10.1109/2944.748115
42. Oh, K. W. and C. H. Ahn, "A new flip-chip bonding technique using micromachined conductive polymer bumps," IEEE Trans. Advanced Packaging, Vol. 22, No. 4, 586-591, Nov. 1999.
doi:10.1109/6040.803450
43. Li, C., F. E. Sauser, R. Azizkhan, C. H. Ahn, and I. Papautsky, "Polymer flip-chip bonding of pressure sensors on flexible kapton film for neonatal catheters," IEEE Int. Conf. Proc., Micro Electro Mechanical Systems, MEMS, 749-752, 2004.
44. Pozar, D. M., Microwave Engineering, 2nd Ed., John Wiley and Sons Inc., 1998.
45. Matthaei, G. L., L. Young, and E. M. T. Jones, Microwave Filters, Impedance-matching Networks, and Coupling Structures, Artech House, 1980.