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PIER PIER B PIER C PIER M PIER Letters
2011-03-30
Symmetric and Asymmetric Double Langmuir Probes Characterization of Radio Frequency Inductivley Coupled Nitrogen Plasma
By
Muhammad Yasin Naz,

    Dr. Muhammad Yasin Naz

    Department of Physics

    University of Agriculture

    Pakistan

    Homepage

Abdul Ghaffar,

    Dr. Abdul Ghaffar

    Department of Physics

    University of Agriculture

    Pakistan

    Homepage

N. U. Rehman,

    Dr. N. U. Rehman

    Department of Physics

    COMSTS Institute of Information Technology

    Pakistan

    Homepage

Muhammad Azam,

    Dr. Muhammad Azam

    Department of Physics

    University of Agriculture

    Pakistan

    Homepage

Shazia Shukrullah,

    Dr. Shazia Shukrullah

    Department of Physics

    University of Agriculture

    Pakistan

    Homepage

A. Qayyum,

    Dr. A. Qayyum

    Pakistan Institute of Nuclear Science and Technology

    Pakistan

    Homepage

Muhammad Zakaullah

    Dr. Muhammad Zakaullah

    Departments of Physics

    Quaid-I-Azam University

    Pakistan

    Homepage

Progress In Electromagnetics Research, Vol. 115, 207-221, 2011
doi:10.2528/PIER11030408
Abstract
The symmetric and asymmetric double Langmuir probe systems with their necessary driving circuits are developed for characterization of low pressure inductively coupled nitrogen plasma, generated and sustained with 13.56 MHz RF source and an automatic impedance matching network. First of all the plasma parameters such as ion saturation current, electron temperature and electron number density are determined with symmetric double probe system at different input RF powers, filling gas pressures and radial distance from the plasma chamber wall. Then the electron temperature and electron energy probability function are determined with asymmetric double probe system at the centre of the discharge plasma chamber by changing the filling gas pressure and input RF power. It is observed that the electron temperature and electron number density increase with the increase in input RF power and radial distance but decreases with the increase in filling gas pressure. The electron energy probability function determined with asymmetric probe system evidently deviates from the Maxwellian, particularly at low filling gas pressures.
Citation
Muhammad Yasin Naz, Abdul Ghaffar, N. U. Rehman, Muhammad Azam, Shazia Shukrullah, A. Qayyum, and Muhammad Zakaullah, "Symmetric and Asymmetric Double Langmuir Probes Characterization of Radio Frequency Inductivley Coupled Nitrogen Plasma," Progress In Electromagnetics Research, Vol. 115, 207-221, 2011.
doi:10.2528/PIER11030408
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