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2012-06-11
A Slot Antenna-Coupled Microbolometer for Detection at 94 GHz
By
Progress In Electromagnetics Research Letters, Vol. 32, 137-143, 2012
Abstract
In this paper, we report on the design, fabrication and characterization of a slot antenna on quarter wavelength silicon substrate coupled to a Titanium microbolometer for detection at 94 GHz. The detector was fabricated using conventional photolithographic and microfabrication techniques. The detector exhibited a responsivity of 0.779 V/W, a noise equivalent power (NEP) of 10.2 nW/√Hz, and a time constant of 3.88 μsec.
Citation
Mohamed Abdel-Rahman, Nageeb Fouad Al-Khalli, Andi Hakim Kusuma, and Nacer Amara Debbar, "A Slot Antenna-Coupled Microbolometer for Detection at 94 GHz ," Progress In Electromagnetics Research Letters, Vol. 32, 137-143, 2012.
doi:10.2528/PIERL12042503
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